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Simulation de dépôt CVD de Si à partir de SiH4 en lit fluidisé

Author: N. Reuge, L. Cadoret, S. Pannala, M. Syamlal, C. Coufort, B. Caussat
EntryType: article
To_appear: à paraître
Language: anglais

Bibtex:
@Article{,
author = {N. Reuge, L. Cadoret, S. Pannala, M. Syamlal, C. Coufort, B. Caussat},

title = "{Simulation de dépôt CVD de Si à partir de SiH4 en lit fluidisé}",

to_appear = {à paraître},

language = {anglais}
}

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Shared by: Loic Cadoret, Brigitte Caussat
Last update: 2007-03-09 11:46:56
Publication #278

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